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Pulici, A., Seguini, G., Fanciulli, M., Perego, M. (2024). Ex-situ doping of ultra-thin silicon nanofilms: phosphorus deactivation and mobility enhancement. Intervento presentato a: 20th Gettering and Defect Engineering in Semiconductor Technology (GADEST) - September 8 to 13 2024, Bad Schandau, Germany.

Ex-situ doping of ultra-thin silicon nanofilms: phosphorus deactivation and mobility enhancement

Andrea Pulici
Primo
;M. Fanciulli;
2024
relazione (orale)
Doping, Silicon-on-Insulator, Mobility Enhancement, Activation, Ioncomplete Ionization, Phosphorus.
English
20th Gettering and Defect Engineering in Semiconductor Technology (GADEST) - September 8 to 13 2024
2024
2024
https://blogs.hrz.tu-freiberg.de/gadest2024/wp-content/uploads/sites/99/2024/08/GADEST-2024-conference-program-20240807.pdf
none
Pulici, A., Seguini, G., Fanciulli, M., Perego, M. (2024). Ex-situ doping of ultra-thin silicon nanofilms: phosphorus deactivation and mobility enhancement. Intervento presentato a: 20th Gettering and Defect Engineering in Semiconductor Technology (GADEST) - September 8 to 13 2024, Bad Schandau, Germany.
02 - Intervento a convegno
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/565923
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